Jiangsu MNT Micro and Nanotech Co., LTD

TEL
0510-85215308
Product Detail
Double Chamber Type  (MNT-D)
Double Chamber Type  (MNT-D)
Product details

Double Chamber Type (MNT-D)

· Substrate size: 4-8 inch

· Substrate Temperature: RT - 600 °C; ±1°C

· Baking Temperature: RT - 150 °C; ±1°C

· Vacuum Chamber: 316L stainless steel

· Precursor Delivery System: up to 6 lines

· DepositionModes: High speed, ultra-high aspect ratio and composite film


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