Jiangsu MNT Micro and Nanotech Co., LTD

Product Detail
Micro Type (MNT-M)
Micro Type (MNT-M)
Product details

Micro Type (MNT-M)

· Substrate size: 4-6 inch

· Substrate Temperature: RT - 400 °C; ±1°C

· Vacuum Chamber: 316L stainless steel, 170 *60 mm

· Precursor Delivery System: 2 lines

· Deposition Modes: High speed or ultra-high aspect ratio

· Main dimensions: 520*520 mm

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